@misc{weko_15706_1, author = "松澤,昭 and 石内,秀美 and 西,宏晃 and 石渡,俊一 and 濱田,基嗣 and 畝川,康夫 and 百瀬,寿代", title = "VLSI工学", howpublished = "application/pdf" }